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FTA2000 Platter or "Chuck"

The standard platter is setup to hold wafers by Teflon edge posts spaced at 90 degrees. These slide in and out in grooves to adjust to any size wafer up to 12 inches / 300 millimeters in diameter. However, ordinary specimens can be placed directly on the platter and the Teflon posts ignored or removed.

The specimen platter is easily replaced or modified. The supplied platter is a round disk 13 inches / 330 millimeters in diameter. Drawings are available to facilitate customers designing their own chuck. Basically the custom chuck can be any shape that fits inside a 330mm circle. Thus squares or rectangles are acceptable.

Stage movement can be programmed in either R-theta-Z coordinates or X-Y-Z coordinates. Separate control screens are available depending on the user's preference.

While the stage itself can physically be up to 330mm in diameter, analysis is restricted to a 300mm circle.